Today's processors owe
advancement to chemically amplified photoresists.
C. Grant Willson
Chemically Amplified Resists – "materials used in
lithography to form the structures in today's semiconductor devices" –
developed at IBM's research lab in San Jose in the early 1980s (the lab since
moved to Almaden, CA in 1986) by professors C. Grant
Willson (who was working at IBM Research at the